Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11886126 | Apparatus and method for removing a single particulate from a substrate | Klaus Edinger, Christian Felix Hermanns, Tilo Sielaff, Christof Baur, Maksym Kompaniiets | 2024-01-30 |
| 11079674 | Method and apparatus for ascertaining a repair shape for processing a defect of a photolithographic mask | Markus Waiblinger | 2021-08-03 |
| 10732501 | Method and device for permanently repairing defects of absent material of a photolithographic mask | Kinga Kornilov, Tristan Bret, Horst Schneider, Thorsten Hofmann | 2020-08-04 |
| 10372032 | Method and device for permanently repairing defects of absent material of a photolithographic mask | Kinga Kornilov, Tristan Bret, Horst Schneider, Thorsten Hofmann | 2019-08-06 |