Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11079674 | Method and apparatus for ascertaining a repair shape for processing a defect of a photolithographic mask | Jens Oster | 2021-08-03 |
| 9990737 | Apparatus and method for correlating images of a photolithographic mask | Dieter Weber | 2018-06-05 |
| 9431212 | Method for determining the performance of a photolithographic mask | Michael Budach, Thomas Scherübl, Dirk Beyer | 2016-08-30 |
| 7820343 | Method for producing a photomask, method for patterning a layer or layer stack and resist stack on a mask substrate | Axel Feicke, Timo Wandel | 2010-10-26 |
| 7811727 | Method for determining an exposure dose and exposure apparatus | Martin Sczyrba, Axel Feicke, Karsten Bubke | 2010-10-12 |