Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7820343 | Method for producing a photomask, method for patterning a layer or layer stack and resist stack on a mask substrate | Markus Waiblinger, Axel Feicke | 2010-10-26 |
| 6821693 | Method for adjusting a multilevel phase-shifting mask or reticle | Gernot Goedl, Dirk Loeffelmacher | 2004-11-23 |