Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7820343 | Method for producing a photomask, method for patterning a layer or layer stack and resist stack on a mask substrate | Markus Waiblinger, Timo Wandel | 2010-10-26 |
| 7811727 | Method for determining an exposure dose and exposure apparatus | Martin Sczyrba, Markus Waiblinger, Karsten Bubke | 2010-10-12 |