Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8257888 | Particle beam writing method, particle beam writing apparatus and maintenance method for same | Christian Buergel, Eugen Foca | 2012-09-04 |
| 7811727 | Method for determining an exposure dose and exposure apparatus | Markus Waiblinger, Axel Feicke, Karsten Bubke | 2010-10-12 |