Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821693 | Method for adjusting a multilevel phase-shifting mask or reticle | Gernot Goedl, Timo Wandel | 2004-11-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821693 | Method for adjusting a multilevel phase-shifting mask or reticle | Gernot Goedl, Timo Wandel | 2004-11-23 |