Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12135540 | Devices and methods for examining and/or processing an element for photolithography | Michael Budach, Christian Rensing, Alexander Freytag, Christian Wojek | 2024-11-05 |
| 11650495 | Apparatus and method for determining a position of an element on a photolithographic mask | Michael Budach | 2023-05-16 |
| 11487211 | Device and method for processing a microstructured component | Timo Luchs, Joachim Welte | 2022-11-01 |
| 11385540 | Apparatus and method for determining a position of an element on a photolithographic mask | Michael Budach | 2022-07-12 |
| 9023666 | Method for electron beam induced etching | Petra Spies, Rainer Becker, Thorsten Hofmann, Klaus Edinger | 2015-05-05 |
| 8632687 | Method for electron beam induced etching of layers contaminated with gallium | Petra Spies, Rainer Becker, Thorsten Hofmann, Klaus Edinger | 2014-01-21 |
| 8623230 | Methods and systems for removing a material from a sample | Petra Spies, Tristan Bret, Rainer Becker, Thorsten Hofmann, Klaus Edinger | 2014-01-07 |
| 8318593 | Method for electron beam induced deposition of conductive material | Petra Spies, Rainer Becker, Thorsten Hofmann, Klaus Edinger | 2012-11-27 |