Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11150552 | Method and apparatus for analyzing a defective location of a photolithographic mask | Michael Budach | 2021-10-19 |
| 9863760 | Method and device for determining a reference point of an orientation marking on a substrate of a photolithographic mask in an automated manner | Michael Budach, Michael R. Jost | 2018-01-09 |