Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11961705 | Method and apparatus for examining a beam of charged particles | Daniel Rhinow, Markus Bauer, Rainer Fettig, David Lämmle, Marion Batz +3 more | 2024-04-16 |
| 11256168 | Apparatus and method for repairing a photolithographic mask | Michael Budach | 2022-02-22 |
| 6366278 | Camera system | Hans Koops | 2002-04-02 |