Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9627324 | Apparatus and method for processing a substrate | Wolfgang Rietzler | 2017-04-18 |
| 6554950 | Method and apparatus for removal of surface contaminants from substrates in vacuum applications | — | 2003-04-29 |
| 6476401 | Moving photocathode with continuous regeneration for image conversion in electron beam lithography | Lee H. Veneklasen, Marian Mankos | 2002-11-05 |