Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9616255 | Safety restraint anchor system | — | 2017-04-11 |
| 7042645 | Micro-lens array and method of making micro-lens array | Francis Houlihan, Madanagopal Kunnavakkam, Omkaram Nalamasu | 2006-05-09 |
| 6906846 | Micro-electro-mechanical system device and method of making same | Raymond A. Cirelli, Michael P. Schlax | 2005-06-14 |
| 6700708 | Micro-lens array and method of making micro-lens array | Francis Houlihan, Madanagopal Kunnavakkam, Omkaram Nalamasu | 2004-03-02 |
| 6528799 | Device and method for suppressing space charge induced aberrations in charged-particle projection lithography systems | Victor Katsap, Masis Mkrtchyan, Stuart Stanton | 2003-03-04 |
| 6492647 | Electron guns for lithography tools | Victor Katsap, Warren K. Waskiewicz | 2002-12-10 |
| 6400090 | Electron emitters for lithography tools | Victor Katsap, Warren K. Waskiewicz | 2002-06-04 |
| 6232040 | Method of electron beam exposure utilizing emitter with conductive mesh grid | Victor Katsap, Warren K. Waskiewicz | 2001-05-15 |
| 6177218 | Lithographic process for device fabrication using electron beam imaging | Joseph Allen Felker, Stuart Stanton | 2001-01-23 |
| 6051346 | Process for fabricating a lithographic mask | Avinoam Kornblit, Anthony E. Novembre | 2000-04-18 |
| 5985493 | Membrane mask for projection lithography | Anthony E. Novembre, Gary Robert Weber | 1999-11-16 |
| 5701014 | Projection lithography apparatus | Steven Berger, George Patrick Watson | 1997-12-23 |
| 5561008 | Process for device fabrication using projection lithography and an apparatus therefor | Steven Berger, George Patrick Watson | 1996-10-01 |
| 5500312 | Masks with low stress multilayer films and a process for controlling the stress of multilayer films | Lloyd R. Harriott, Cynthia A. Volkert, Warren K. Waskiewicz, David L. Windt | 1996-03-19 |
| 5316879 | Sub-micron device fabrication using multiple aperture filter | Steven Berger | 1994-05-31 |
| 5279925 | Projection electron lithographic procedure | Steven Berger | 1994-01-18 |
| 5260151 | Device manufacture involving step-and-scan delineation | Steven Berger, Marvin Leventhal | 1993-11-09 |