Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6177218 | Lithographic process for device fabrication using electron beam imaging | James A. Liddle, Stuart Stanton | 2001-01-23 |
| 5600146 | Charged particle beam multiple-pole deflection control circuitry | Thomas Russell | 1997-02-04 |