Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lithographic process for device fabrication using electron beam imaging

Lithographic process for device fabrication using electron beam imaging

US Patent 6177218 · Granted Jan 23, 2001

Estimated economic value: $53,311,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Safety restraint anchor system2017
Projection electron beam lithography apparatus and method employing an estimator2007
Projection electron beam lithography apparatus and method employing an estimator2006
Micro-lens array and method of making micro-lens array2006
Micro-electro-mechanical system device and method of making same2005
Optical demultiplexer/multiplexer architecture2005
Micro-lens array and method of making micro-lens array2004
Device and method for suppressing space charge induced aberrations in charged-pa2003
Device and method for suppressing space charge induced aberrations in charged-pa2003
Electron guns for lithography tools2002
Multi-channel grating interference alignment sensor2002
Electron emitters for lithography tools2002