Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Micro-electro-mechanical system device and method of making same

Micro-electro-mechanical system device and method of making same

US Patent 6906846 · Granted Jun 14, 2005

Estimated economic value: $11,599,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Front-mount cameras on agricultural sprayer with real-time, on-machine target se2025
Agricultural sprayer with real-time, on-machine target sensor2024
Safety restraint anchor system2017
Interconnect including a pliable surface and use thereof2009
High density nanostructured interconnection2008
High density nanostructured interconnection2008
Micro-lens array and method of making micro-lens array2006
Micromirror having counterbalancing structures and method for manufacturing same2005
Micro-lens array and method of making micro-lens array2004
Device and method for suppressing space charge induced aberrations in charged-pa2003
Electron guns for lithography tools2002
Electron emitters for lithography tools2002