| 6838213 |
Process for fabricating a mask |
Richard J. Kasica |
2005-01-04 |
| 6372393 |
Process for fabricating a projection electron lithography mask and a removable, reusable cover for use therein |
Carlos G. Caminos, Chester S. Knurek |
2002-04-16 |
| 6368753 |
Mask repair |
Lloyd R. Harriott |
2002-04-09 |
| 6251543 |
Process for fabricating a projection electron lithography mask and a removable reusable cover for use therein |
Carlos G. Caminos, Chester S. Knurek |
2001-06-26 |
| 6051346 |
Process for fabricating a lithographic mask |
Avinoam Kornblit, James A. Liddle |
2000-04-18 |
| 5985493 |
Membrane mask for projection lithography |
James A. Liddle, Gary Robert Weber |
1999-11-16 |
| 5948570 |
Process for dry lithographic etching |
Avinoam Kornblit |
1999-09-07 |
| 5688634 |
Energy sensitive resist material and process for device fabrication using the resist material |
David Mixon |
1997-11-18 |
| 5656182 |
Process for fabricating a device in which the process is controlled by near-field imaging latent features introduced into energy sensitive resist materials |
Herschel M. Marchman, Jay Trautman |
1997-08-12 |
| 5451480 |
Artical fabrication utilizing lithographic processes |
— |
1995-09-19 |
| 5374504 |
Resist materials and processes of their use |
James E. Hanson |
1994-12-20 |
| 5366851 |
Device fabrication process |
— |
1994-11-22 |
| 5066566 |
Resist materials |
— |
1991-11-19 |
| 4935094 |
Negative resist with oxygen plasma resistance |
David Mixon |
1990-06-19 |
| 4892617 |
Processes involving lithographic materials |
Frank S. Bates, Mark A. Hartney |
1990-01-09 |
| 4701342 |
Negative resist with oxygen plasma resistance |
Elsa Reichmanis |
1987-10-20 |