Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7902047 | Dual chamber system providing simultaneous etch and deposition on opposing substrate sides for growing low defect density epitaxial layers | Nagraj Kulkarni | 2011-03-08 |
| 6838213 | Process for fabricating a mask | Anthony E. Novembre | 2005-01-04 |