Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8999458 | Method and apparatus for fabricating or altering microstructures using local chemical alterations | Supratik Guha, Hendrik F. Hamann, Robert J. von Gutfeld | 2015-04-07 |
| 8181594 | Method and apparatus for fabricating or altering microstructures using local chemical alterations | Supratik Guha, Hendrik F. Hamann, Robert J. von Gutfeld | 2012-05-22 |
| 8054558 | Multiple magnification optical system with single objective lens | Gonzalo Amador | 2011-11-08 |
| 7961397 | Single-channel optical processing system for energetic-beam microscopes | Thomas M. Moore, Rocky Kruger | 2011-06-14 |
| 7781733 | In-situ high-resolution light-optical channel for optical viewing and surface processing in parallel with charged particle (FIB and SEM) techniques | Steven B. Herschbein, Narender Rana, Chad Rue | 2010-08-24 |
| 7351966 | High-resolution optical channel for non-destructive navigation and processing of integrated circuits | Steven B. Herschbein, Chad Rue, Michael Renner, Narender Rana | 2008-04-01 |
| 7329361 | Method and apparatus for fabricating or altering microstructures using local chemical alterations | Supratik Guha, Hendrik F. Hamann, Robert J. von Gutfeld | 2008-02-12 |
| 7304302 | Systems configured to reduce distortion of a resist during a metrology process and systems and methods for reducing alteration of a specimen during analysis | Peter Nunan, Muhran Nasser-Ghodsi, Mark Borowicz, Rudy F. Garcia, Tzu-Chin Chuang +1 more | 2007-12-04 |
| 6843893 | Metal dry etch using electronic field | Steven B. Herschbein, Chad Rue, Michael Sievers | 2005-01-18 |
| 6787783 | Apparatus and techniques for scanning electron beam based chip repair | Aaron Shore | 2004-09-07 |
| 5811796 | Optical probe microscope having a fiber optic tip that receives both a dither motion and a scanning motion, for nondestructive metrology of large sample surfaces | Jay Trautman | 1998-09-22 |
| 5709803 | Cylindrical fiber probes and methods of making them | Robert W. Filas | 1998-01-20 |
| 5703979 | Cylindrical fiber probe devices | Robert W. Filas | 1997-12-30 |
| 5693938 | Optical probe microscope having a fiber optic tip that receives both a dither motion and a scanning motion, for nondestructive metrology of large sample surfaces | Jay Trautman | 1997-12-02 |
| 5676852 | Cylindrical fiber probes and methods of making them | Robert W. Filas | 1997-10-14 |
| 5656182 | Process for fabricating a device in which the process is controlled by near-field imaging latent features introduced into energy sensitive resist materials | Anthony E. Novembre, Jay Trautman | 1997-08-12 |
| 5570441 | Cylindrical fiber probes and methods of making them | Robert W. Filas | 1996-10-29 |
| 5531343 | Cylindrical fiber probe devices and methods of making them | Robert W. Filas | 1996-07-02 |
| 5480049 | Method for making a fiber probe device having multiple diameters | — | 1996-01-02 |
| 5480046 | Fiber probe fabrication having a tip with concave sidewalls | Robert W. Filas | 1996-01-02 |
| 5426302 | Optically guided macroscopic-scan-range/nanometer resolution probing system | Grover C. Wetsel | 1995-06-20 |
| 5395741 | Method of making fiber probe devices using patterned reactive ion etching | — | 1995-03-07 |
| 5394500 | Fiber probe device having multiple diameters | — | 1995-02-28 |