Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9330985 | Automated hybrid metrology for semiconductor device fabrication | Alok Vaid, Ned R. Saleh, Matthew Sendelbach | 2016-05-03 |
| 9262819 | System and method for estimating spatial characteristics of integrated circuits | Taher Kagalwala, Yunlin Zhang | 2016-02-16 |
| 8030157 | Liner protection in deep trench etching | Habib Hichri, Ahmad D. Katnani, Kaushik A. Kumar, Richard S. Wise, Hakeem B. S. Akinmade-Yusuff | 2011-10-04 |
| 7781733 | In-situ high-resolution light-optical channel for optical viewing and surface processing in parallel with charged particle (FIB and SEM) techniques | Steven B. Herschbein, Herschel M. Marchman, Chad Rue | 2010-08-24 |
| 7351966 | High-resolution optical channel for non-destructive navigation and processing of integrated circuits | Herschel M. Marchman, Steven B. Herschbein, Chad Rue, Michael Renner | 2008-04-01 |
| 7119333 | Ion detector for ion beam applications | Steven B. Herschbein, Chad Rue, Michael Sievers | 2006-10-10 |