Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11300948 | Process control of semiconductor fabrication based on spectra quality metrics | Alok Vaid, Shay Yogev, Matthew Sendelbach, Paul ISBESTER, Yoav Etzioni | 2022-04-12 |
| 10664638 | Measuring complex structures in semiconductor fabrication | Sridhar Mahendrakar, Matthew Sendelbach, Alok Vaid | 2020-05-26 |
| 10030971 | Measurement system and method for measuring in thin films | Cornel Bozdog, Alok Vaid, Sridhar Mahendrakar, Mainul Hossain | 2018-07-24 |
| 9262819 | System and method for estimating spatial characteristics of integrated circuits | Narender Rana, Yunlin Zhang | 2016-02-16 |