| 8304276 |
Film stress management for MEMS through selective relaxation |
— |
2012-11-06 |
| 8138495 |
Film stress management for MEMS through selective relaxation |
— |
2012-03-20 |
| 6537867 |
High speed low voltage semiconductor devices and method of fabrication |
Ronald L. Freyman, Isik C. Kizilyalli, Ross A. Kohler, Omkaram Nalamasu, Mark R. Pinto +2 more |
2003-03-25 |
| 6392787 |
Process for fabricating article comprising photonic band gap material |
Raymond A. Cirelli, Omkaram Nalamasu, Sanjay Patel, Stanley Pau, Christopher A. White +1 more |
2002-05-21 |
| 6251546 |
Method of fabricating devices using an attenuated phase-shifting mask and an attenuated phase-shifting mask |
Raymond A. Cirelli, Omkaram Nalamasu, Stanley Pau |
2001-06-26 |
| 6218057 |
Lithographic process having sub-wavelength resolution |
Raymond A. Cirelli, Omkaram Nalamasu, Stanley Pau |
2001-04-17 |
| 6015644 |
Process for device fabrication using a variable transmission aperture |
Raymond A. Cirelli, Masis Mkrtchyan, Lee E. Trimble, David L. Windt |
2000-01-18 |
| 5736281 |
Dose modification proximity effect compensation (PEC) technique for electron beam lithography |
— |
1998-04-07 |
| 5701014 |
Projection lithography apparatus |
Steven Berger, James A. Liddle |
1997-12-23 |
| 5561008 |
Process for device fabrication using projection lithography and an apparatus therefor |
Steven Berger, James A. Liddle |
1996-10-01 |
| 4797179 |
Fabrication of integral lenses on LED devices |
Kathleen Meehan |
1989-01-10 |
