Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8304276 | Film stress management for MEMS through selective relaxation | — | 2012-11-06 |
| 8138495 | Film stress management for MEMS through selective relaxation | — | 2012-03-20 |
| 6537867 | High speed low voltage semiconductor devices and method of fabrication | Ronald L. Freyman, Isik C. Kizilyalli, Ross A. Kohler, Omkaram Nalamasu, Mark R. Pinto +2 more | 2003-03-25 |
| 6392787 | Process for fabricating article comprising photonic band gap material | Raymond A. Cirelli, Omkaram Nalamasu, Sanjay Patel, Stanley Pau, Christopher A. White +1 more | 2002-05-21 |
| 6251546 | Method of fabricating devices using an attenuated phase-shifting mask and an attenuated phase-shifting mask | Raymond A. Cirelli, Omkaram Nalamasu, Stanley Pau | 2001-06-26 |
| 6218057 | Lithographic process having sub-wavelength resolution | Raymond A. Cirelli, Omkaram Nalamasu, Stanley Pau | 2001-04-17 |
| 6015644 | Process for device fabrication using a variable transmission aperture | Raymond A. Cirelli, Masis Mkrtchyan, Lee E. Trimble, David L. Windt | 2000-01-18 |
| 5736281 | Dose modification proximity effect compensation (PEC) technique for electron beam lithography | — | 1998-04-07 |
| 5701014 | Projection lithography apparatus | Steven Berger, James A. Liddle | 1997-12-23 |
| 5561008 | Process for device fabrication using projection lithography and an apparatus therefor | Steven Berger, James A. Liddle | 1996-10-01 |
| 4797179 | Fabrication of integral lenses on LED devices | Kathleen Meehan | 1989-01-10 |