Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11358172 | Method for treating substrates with an aqueous liquid medium exposed to UV-radiation | Davide Dattilo, Uwe Dietze | 2022-06-14 |
| 10504774 | Lithographic patterning to form fine pitch features | Sunil Kumar Singh, Sohan S. Mehta, Ravi Prakash Srivastava | 2019-12-10 |
| 10401724 | Pellicle replacement in EUV mask flow | Oktawian Sobieraj, Paul Ackmann | 2019-09-03 |
| 10265739 | Method and apparatus for treating substrates | Uwe Dietze, Peter Dress | 2019-04-23 |
| 9662684 | Method and apparatus for treating substrates | Uwe Dietze, Peter Dress | 2017-05-30 |
| 9195132 | Mask structures and methods of manufacturing | Suraj K. Patil, Uzodinma Okoroanyanwu, Obert R. Wood, II, Pawitter Mangat | 2015-11-24 |