Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11358172 | Method for treating substrates with an aqueous liquid medium exposed to UV-radiation | Uwe Dietze, SherJang Singh | 2022-06-14 |
| 10898932 | Method and apparatus for cleaning a substrate and computer program product | Uwe Dietze, Habib Hichri, Seongkuk Lee, Martin Samayoa | 2021-01-26 |
| 10416575 | Apparatus and method for cleaning a partial area of a substrate | Uwe Dietze, Martin Samayoa | 2019-09-17 |