Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10898932 | Method and apparatus for cleaning a substrate and computer program product | Uwe Dietze, Habib Hichri, Seongkuk Lee, Davide Dattilo | 2021-01-26 |
| 10722925 | Treatment head, treatment system and method for treating a local surface area of a substrate | Uwe Dietze | 2020-07-28 |
| 10416575 | Apparatus and method for cleaning a partial area of a substrate | Davide Dattilo, Uwe Dietze | 2019-09-17 |