Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10401724 | Pellicle replacement in EUV mask flow | Paul Ackmann, SherJang Singh | 2019-09-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10401724 | Pellicle replacement in EUV mask flow | Paul Ackmann, SherJang Singh | 2019-09-03 |