Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504774 | Lithographic patterning to form fine pitch features | Sunil Kumar Singh, SherJang Singh, Ravi Prakash Srivastava | 2019-12-10 |
| 10353288 | Litho-litho-etch double patterning method | Vineet Sharma, Craig D. Higgins, Sunil Kumar Singh, Feng Wang | 2019-07-16 |
| 9691654 | Methods and devices for back end of line via formation | Sunil Kumar Singh, Ravi Prakash Srivastava | 2017-06-27 |
| 9171735 | Method for fabricating a semiconductor integrated circuit with a litho-etch, litho-etch process for etching trenches | Norman Chen, Yuyang Sun, Matthew T. Herrick, Shyam Sundar Pal, Jeong Soo Kim | 2015-10-27 |
| 8932961 | Critical dimension and pattern recognition structures for devices manufactured using double patterning techniques | Tong Qing Chen, Vikrant Chauhan, Ravi Prakash Srivastava, Catherine B. Labelle, Mark Kelling | 2015-01-13 |
| 8350235 | Semiconductor intra-field dose correction | Hyung-Rae Lee, Dong-Hee Yu, Niall Shepherd, Daniel A. Corliss | 2013-01-08 |