Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9171735 | Method for fabricating a semiconductor integrated circuit with a litho-etch, litho-etch process for etching trenches | Sohan S. Mehta, Norman Chen, Matthew T. Herrick, Shyam Sundar Pal, Jeong Soo Kim | 2015-10-27 |
| 9064086 | Retargeting semiconductor device shapes for multiple patterning processes | Chidam Kallingal, Norman Chen | 2015-06-23 |
| 8993224 | Multiple patterning process for forming trenches or holes using stitched assist features | Norman Chen, Jian Liu | 2015-03-31 |
| 8921016 | Methods involving color-aware retargeting of individual decomposed patterns when designing masks to be used in multiple patterning processes | Chidambaram G. Kallingal | 2014-12-30 |
| 8910094 | Retargeting semiconductor device shapes for multiple patterning processes | Chidam Kallingal, Norman Chen | 2014-12-09 |
| 8869075 | Locally optimized coloring for cleaning lithographic hotspots | Chidambaram G. Kallingal, Marc Tarabbia | 2014-10-21 |
| 8782571 | Multiple patterning process for forming trenches or holes using stitched assist features | Norman Chen, Jian Liu | 2014-07-15 |