Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9097989 | Target and method for mask-to-wafer CD, pattern placement and overlay measurement and control | Christopher P. Ausschnitt, Jed H. Rankin, Roger J. Yerdon | 2015-08-04 |
| 9087740 | Fabrication of lithographic image fields using a proximity stitch metrology | Christopher P. Ausschnitt, Roger J. Yerdon | 2015-07-21 |
| 8339605 | Multilayer alignment and overlay target and measurement method | Christopher P. Ausschnitt, Lewis A. Binns, Nigel P. Smith | 2012-12-25 |
| 8107079 | Multi layer alignment and overlay target and measurement method | Christopher P. Ausschnitt, Lewis A. Binns, Nigel P. Smith | 2012-01-31 |
| 7876439 | Multi layer alignment and overlay target and measurement method | Christopher P. Ausschnitt, Lewis A. Binns, Nigel P. Smith | 2011-01-25 |
| 7626702 | Overlay target and measurement method using reference and sub-grids | Christopher P. Ausschnitt | 2009-12-01 |
| 7474401 | Multi-layer alignment and overlay target and measurement method | Christopher P. Ausschnitt, Lewis A. Binns, Nigel P. Smith | 2009-01-06 |
| 7359054 | Overlay target and measurement method using reference and sub-grids | Christopher P. Ausschnitt | 2008-04-15 |
| 6937337 | Overlay target and measurement method using reference and sub-grids | Christopher P. Ausschnitt | 2005-08-30 |