| 9097989 |
Target and method for mask-to-wafer CD, pattern placement and overlay measurement and control |
Christopher P. Ausschnitt, Jed H. Rankin, Roger J. Yerdon |
2015-08-04 |
| 9087740 |
Fabrication of lithographic image fields using a proximity stitch metrology |
Christopher P. Ausschnitt, Roger J. Yerdon |
2015-07-21 |
| 8339605 |
Multilayer alignment and overlay target and measurement method |
Christopher P. Ausschnitt, Lewis A. Binns, Nigel P. Smith |
2012-12-25 |
| 8107079 |
Multi layer alignment and overlay target and measurement method |
Christopher P. Ausschnitt, Lewis A. Binns, Nigel P. Smith |
2012-01-31 |
| 7876439 |
Multi layer alignment and overlay target and measurement method |
Christopher P. Ausschnitt, Lewis A. Binns, Nigel P. Smith |
2011-01-25 |
| 7626702 |
Overlay target and measurement method using reference and sub-grids |
Christopher P. Ausschnitt |
2009-12-01 |
| 7474401 |
Multi-layer alignment and overlay target and measurement method |
Christopher P. Ausschnitt, Lewis A. Binns, Nigel P. Smith |
2009-01-06 |
| 7359054 |
Overlay target and measurement method using reference and sub-grids |
Christopher P. Ausschnitt |
2008-04-15 |
| 6937337 |
Overlay target and measurement method using reference and sub-grids |
Christopher P. Ausschnitt |
2005-08-30 |
