Issued Patents All Time
Showing 51–75 of 106 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7736841 | Reflective film interface to restore transverse magnetic wave contrast in lithographic processing | Kafai Lai, Dirk Pfeiffer | 2010-06-15 |
| 7712071 | Printing a mask with maximum possible process window through adjustment of the source distribution | — | 2010-05-04 |
| 7685559 | Step-walk relaxation method for global optimization of masks | — | 2010-03-23 |
| 7587702 | Step-walk relaxation method for global optimization of masks | — | 2009-09-08 |
| 7512927 | Printability verification by progressive modeling accuracy | Gregg M. Gallatin, Kafai Lai, Maharaj Mukherjee | 2009-03-31 |
| 7470504 | Reflective film interface to restore transverse magnetic wave contrast in lithographic processing | Kafai Lai, Dirk Pfeiffer | 2008-12-30 |
| 7440083 | Printing a mask with maximum possible process window through adjustment of the source distribution | — | 2008-10-21 |
| 7434196 | Renesting interaction map into design for efficient long range calculations | Gregg M. Gallatin, Emanuel Gofman, Kafai Lai, Mark A. Lavin, Maharaj Mukherjee +2 more | 2008-10-07 |
| 7366342 | Simultaneous computation of multiple points on one or multiple cut lines | Gregg M. Gallatin, Emanuel Gofman, Kafai Lai, Mark A. Lavin, Maharaj Mukherjee +2 more | 2008-04-29 |
| 7363611 | Printing a mask with maximum possible process window through adjustment of the source distribution | — | 2008-04-22 |
| 7343271 | Incorporation of a phase map into fast model-based optical proximity correction simulation kernels to account for near and mid-range flare | Gregg M. Gallatin, Emanuel Gofman, Kafai Lai, Mark A. Lavin, Maharaj Mukherjee +2 more | 2008-03-11 |
| 7343582 | Optical proximity correction using progressively smoothed mask shapes | Maharaj Mukherjee, Scott M. Mansfield, Kafai Lai | 2008-03-11 |
| 7287239 | Performance in model-based OPC engine utilizing efficient polygon pinning method | Gregg M. Gallatin, Emanuel Gofman, Kafai Lai, Mark A. Lavin, Maharaj Mukherjee +2 more | 2007-10-23 |
| 7269817 | Lithographic process window optimization under complex constraints on edge placement | Fook-Luen Heng, Mark A. Lavin, Jin-Fuw Lee, Daniel L. Ostapko, Nakgeuon Seong | 2007-09-11 |
| 7131104 | Fast and accurate optical proximity correction engine for incorporating long range flare effects | Gregg M. Gallatin, Emanuel Gofman, Kafai Lai, Mark A. Lavin, Dov Ramm +3 more | 2006-10-31 |
| 7127699 | Method for optimizing a number of kernels used in a sum of coherent sources for optical proximity correction in an optical microlithography process | Gregg M. Gallatin, Emanuel Gofman, Kafai Lai, Mark A. Lavin, Maharaj Mukherjee +2 more | 2006-10-24 |
| 7097884 | Stability of ion beam generated alignment layers by surface modification | Alessandro C. Callegari, Praveen Chaudhari, Fuad E. Doany, James P. Doyle, Eileen A. Galligan +6 more | 2006-08-29 |
| 7079223 | Fast model-based optical proximity correction | Gregg M. Gallatin, Ronald Gordon, Nakgeuon Seong, Alexey Y. Lvov, William D. Hinsberg +3 more | 2006-07-18 |
| 7057686 | Liquid crystal structure with improved black state, and projector using same | Kenneth C. Ho, Minhua Lu, Kei-Hsiung Yang | 2006-06-06 |
| 7057709 | Printing a mask with maximum possible process window through adjustment of the source distribution | — | 2006-06-06 |
| 7055126 | Renesting interaction map into design for efficient long range calculations | Gregg M. Gallatin, Emanuel Gofman, Kafai Lai, Mark A. Lavin, Maharaj Mukherjee +2 more | 2006-05-30 |
| 7010776 | Extending the range of lithographic simulation integrals | Gregg M. Gallatin, Emanuel Gofman, Kafai Lai, Mark A. Lavin, Maharaj Mukherjee +2 more | 2006-03-07 |
| 6869739 | Integrated lithographic print and detection model for optical CD | Christopher P. Ausschnitt, Ronald Gordon, Christopher J. Progler | 2005-03-22 |
| 6798475 | Reflective light valve | Kenneth C. Ho, Minhua Lu, Kei-Hsiung Yang | 2004-09-28 |
| 6665033 | Method for forming alignment layer by ion beam surface modification | Alessandro C. Callegari, Praveen Chaudhari, Fuad E. Doany, James P. Doyle, Eileen A. Galligan +6 more | 2003-12-16 |