Issued Patents All Time
Showing 51–75 of 126 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7466429 | Profiling complex surface structures using scanning interferometry | Robert Stoner, Xavier Colonna De Lega | 2008-12-16 |
| 7456975 | Methods and systems for interferometric analysis of surfaces and related applications | — | 2008-11-25 |
| 7446882 | Interferometer for determining characteristics of an object surface | Xavier Colonna De Lega | 2008-11-04 |
| 7428057 | Interferometer for determining characteristics of an object surface, including processing and calibration | Xavier Colonna De Lega | 2008-09-23 |
| 7417743 | Interferometry systems and methods | — | 2008-08-26 |
| 7403289 | Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures | — | 2008-07-22 |
| 7324214 | Interferometer and method for measuring characteristics of optically unresolved surface features | Michael J. Darwin, Robert Stoner, Gregg M. Gallatin, Xavier Colonna De Lega | 2008-01-29 |
| 7324210 | Scanning interferometry for thin film thickness and surface measurements | Xavier Colonna De Lega | 2008-01-29 |
| 7321431 | Method and system for analyzing low-coherence interferometry signals for information about thin film structures | — | 2008-01-22 |
| 7315382 | Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures | — | 2008-01-01 |
| 7298494 | Methods and systems for interferometric analysis of surfaces and related applications | — | 2007-11-20 |
| 7292346 | Triangulation methods and systems for profiling surfaces through a thin film coating | Xavier Colonna De Lega | 2007-11-06 |
| 7289224 | Low coherence grazing incidence interferometry for profiling and tilt sensing | Xavier Colonna De Lega, Michael Kuchel | 2007-10-30 |
| 7289225 | Surface profiling using an interference pattern matching template | — | 2007-10-30 |
| 7271918 | Profiling complex surface structures using scanning interferometry | Robert Stoner, Xavier Colonna De Lega | 2007-09-18 |
| 7239398 | Profiling complex surface structures using height scanning interferometry | Robert Stoner, Xavier Colonna De Lega | 2007-07-03 |
| 7139081 | Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures | — | 2006-11-21 |
| 7126698 | Measurement of complex surface shapes using a spherical wavefront | Xavier Colonna De Lega | 2006-10-24 |
| 7106454 | Profiling complex surface structures using scanning interferometry | Robert Stoner, Xavier Colonna De Lega | 2006-09-12 |
| 7102761 | Scanning interferometry | Xavier Colonna De Lega, David Grigg | 2006-09-05 |
| 7068376 | Interferometry method and apparatus for producing lateral metrology images | — | 2006-06-27 |
| 7046371 | Interferometer having a coupled cavity geometry for use with an extended source | Xavier Colonna De Lega | 2006-05-16 |
| 7043121 | Method and apparatus for writing apodized patterns | — | 2006-05-09 |
| 7030996 | Measurement of complex surface shapes using a spherical wavefront | Xavier Colonna De Lega | 2006-04-18 |
| 7030995 | Apparatus and method for mechanical phase shifting interferometry | Leslie L. Deck | 2006-04-18 |