Issued Patents All Time
Showing 26–50 of 126 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8072611 | Interferometric analysis of under-resolved features | — | 2011-12-06 |
| 8045175 | Equal-path interferometer | Leslie L. Deck, James F. Biegen, Chris L. Koliopoulos | 2011-10-25 |
| 8004688 | Scan error correction in low coherence scanning interferometry | Mark Davidson, Jan Liesener, Xavier Colonna de Lega, Leslie L. Deck | 2011-08-23 |
| 7978337 | Interferometer utilizing polarization scanning | Xavier Colonna De Lega | 2011-07-12 |
| 7978338 | Compound reference interferometer | Mark Davidson, Jan Liesener, Xavier Colonna De Lega, Leslie L. Deck | 2011-07-12 |
| 7952724 | Interferometer with multiple modes of operation for determining characteristics of an object surface | Xavier Colonna De Lega | 2011-05-31 |
| 7948637 | Error compensation in phase shifting interferometry | — | 2011-05-24 |
| 7948636 | Interferometer and method for measuring characteristics of optically unresolved surface features | Michael J. Darwin, Robert Stoner, Gregg M. Gallatin, Xavier Colonna De Lega | 2011-05-24 |
| 7933025 | Sinusoidal phase shifting interferometry | — | 2011-04-26 |
| 7924435 | Apparatus and method for measuring characteristics of surface features | Xavier Colonna de Lega | 2011-04-12 |
| 7889355 | Interferometry for lateral metrology | Xavier Colonna De Lega, Robert Stoner | 2011-02-15 |
| 7884947 | Interferometry for determining characteristics of an object surface, with spatially coherent illumination | Xavier Colonna De Lega | 2011-02-08 |
| 7869057 | Multiple-angle multiple-wavelength interferometer using high-NA imaging and spectral analysis | — | 2011-01-11 |
| 7826064 | Interferometer system for monitoring an object | Leslie L. Deck, Carl A. Zanoni | 2010-11-02 |
| 7812963 | Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures | — | 2010-10-12 |
| 7684049 | Interferometer and method for measuring characteristics of optically unresolved surface features | Michael J. Darwin, Robert Stoner, Gregg M. Gallatin, Xavier Colonna De Lega | 2010-03-23 |
| 7636168 | Interferometry method and system including spectral decomposition | Xavier Colonna De Lega | 2009-12-22 |
| 7636166 | Interferometer system for monitoring an object | Leslie L. Deck, Carl A. Zanoni | 2009-12-22 |
| 7616323 | Interferometer with multiple modes of operation for determining characteristics of an object surface | Xavier Colonna De Lega | 2009-11-10 |
| 7586620 | Methods and systems for interferometric analysis of surfaces and related applications | — | 2009-09-08 |
| 7564568 | Phase shifting interferometry with multiple accumulation | Leslie L. Deck | 2009-07-21 |
| 7564566 | Method and system for analyzing low-coherence interferometry signals for information about thin film structures | — | 2009-07-21 |
| 7522288 | Compensation of systematic effects in low coherence interferometry | — | 2009-04-21 |
| 7492469 | Interferometry systems and methods using spatial carrier fringes | — | 2009-02-17 |
| 7468799 | Scanning interferometry for thin film thickness and surface measurements | Xavier Colonna de Lega | 2008-12-23 |