Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6646779 | Strain-isolated stage mirror | Peter B. Mumola, Steven R. Patterson | 2003-11-11 |
| 6301009 | In-situ metrology system and method | — | 2001-10-09 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6646779 | Strain-isolated stage mirror | Peter B. Mumola, Steven R. Patterson | 2003-11-11 |
| 6301009 | In-situ metrology system and method | — | 2001-10-09 |