Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6646779 | Strain-isolated stage mirror | Peter B. Mumola, Steven R. Patterson | 2003-11-11 | $4,138,000 |
| 6301009 | In-situ metrology system and method | — | 2001-10-09 | $5,855,000 |