Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11656555 | Lithographic apparatus and illumination uniformity correction system | Janardan Nath, Todd R. Downey, Joseph H. Lyons, Ozer Unluhisarcikli, Alexander Harris Ledbetter +2 more | 2023-05-23 |
| 9136751 | Linear motor magnetic shield apparatus for lithographic systems | Roberto B. Wiener, Pradeep K. Govil, Andrew Michael Nelson | 2015-09-15 |
| 9130443 | Linear motor magnetic shield apparatus | Roberto B. Wiener, Pradeep K. Govil, Andrew Michael Nelson | 2015-09-08 |
| 8900167 | Passive swing assist leg exoskeleton | Sunil K. Agrawal, Sai Banala | 2014-12-02 |