| 9140996 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Joost Jeroen Ottens |
2015-09-22 |
| 9081300 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +1 more |
2015-07-14 |
| 9036127 |
Lithographic apparatus |
Clemens Johannes Gerardus Van Den Dungen, Nicolaas Franciscus Koppelaars, Paulus Martinus Maria Liebregts, Johannes Catharinus Hubertus Mulkens, Erik Henricus Egidius Catharina Eummelen +7 more |
2015-05-19 |
| 9019466 |
Lithographic apparatus, reflective member and a method of irradiating the underside of a liquid supply system |
Youri Johannes Laurentius Maria Van Dommelen, Hans Jansen, Robert Douglas Watso, Anthonius Martinus Cornelis Petrus De Jong, Jan Willem Cromwijk +1 more |
2015-04-28 |
| 9013682 |
Clamping device and object loading method |
Rene Theodorus Petrus Compen, Johannes Henricus Wilhelmus Jacobs, Joost Jeroen Ottens, Martin Frans Pierre Smeets |
2015-04-21 |
| 8953141 |
Immersion lithographic apparatus and device manufacturing method with asymmetric acceleration profile of substrate table to maintain meniscus of immersion liquid |
Sjoerd Nicolaas Lambertus Donders, Christian Wagner, Rogier Hendrikus Magdalena Cortie |
2015-02-10 |
| 8913228 |
Lithographic apparatus and device manufacturing method |
Maurice Willem Jozef Etiënne Wijckmans, Martinus Agnes Willem Cuijpers, Frits Van Der Meulen, Joost Jeroen Ottens, Theodorus Petrus Maria Cadee +7 more |
2014-12-16 |
| 8902403 |
Lithographic apparatus and device manufacturing method |
Jozef Petrus Henricus Benschop, Alexander Padiy, Tao Chen |
2014-12-02 |
| 8860924 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hans Jansen +4 more |
2014-10-14 |
| 8848165 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Bob Streefkerk |
2014-09-30 |
| 8823918 |
Lithographic apparatus and a method of operating the apparatus |
Robert Douglas Watso, Youri Johannes Laurentius Maria Van Dommelen, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +7 more |
2014-09-02 |
| 8823919 |
Lithographic apparatus, removable member and device manufacturing method |
Nina Vladimirovna Dziomkina, Roelof Frederik De Graaf, Marcus Adrianus Van De Kerkhof, Paulus Martinus Maria Liebregts, Gerardus Martinus Antonius De Rooij +4 more |
2014-09-02 |
| 8786823 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Joost Jeroen Ottens |
2014-07-22 |
| 8711326 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Ronald Van Der Ham, Johannes Catharinus Hubertus Mulkens, Richard Moerman, Michel Riepen, Sergei Shulepov +8 more |
2014-04-29 |
| 8687168 |
Lithographic apparatus and device manufacturing method |
Roelof Frederik De Graaf, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +3 more |
2014-04-01 |
| 8681311 |
Lithographic apparatus and device manufacturing method |
Nicolaas Ten Kate, Michel Riepen, Sergei Shulepov, Sjoerd Nicolaas Lambertus Donders |
2014-03-25 |
| 8659741 |
Lithographic apparatus, removable member and device manufacturing method |
Roelof Frederik De Graaf, Marcus Adrianus Van De Kerkhof, Paulus Martinus Maria Liebregts, Gerardus Martinus Antonius De Rooij, Martijn Houben +4 more |
2014-02-25 |
| 8564763 |
Lithographic apparatus and method |
Johannes Henricus Wilhelmus Jacobs, Frits Van Der Meulen, Joost Jeroen Ottens, Anko Jozef Cornelus Sijben, Wouterus Johannes Petrus Maria Maas +3 more |
2013-10-22 |
| 8564760 |
Lithographic apparatus, device manufacturing method and a control system |
Sjoerd Nicolaas Lambertus Donders, Nicolaas Rudolf Kemper |
2013-10-22 |
| 8514365 |
Lithographic apparatus and device manufacturing method |
Frederik Eduard De Jong, Marcel Hendrikus Maria Beems, Marinus Aart Van Den Brink, Johannes Henricus Wilhelmus Jacobs, Leon Martin Levasier +10 more |
2013-08-20 |
| 8481978 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sebastiaan Maria Johannes Cornelissen, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +7 more |
2013-07-09 |
| 8446563 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +12 more |
2013-05-21 |
| 8432531 |
Lithographic apparatus and a method of operating the apparatus |
Kornelis Tijmen Hoekerd, Roelof Frederik De Graaf, Hans Jansen, Antonius Johannus Van Der Net, Pieter Jacob Kramer +4 more |
2013-04-30 |
| 8427629 |
Lithographic apparatus and device manufacturing method |
Carlo Cornelis Maria Luijten, Sjoerd Nicolaas Lambertus Donders, Nicolaas Rudolf Kemper, Erik Roelof Loopstra, Bob Streefkerk +3 more |
2013-04-23 |
| 8421996 |
Lithographic apparatus |
Nicolaas Ten Kate, Marcel Beckers, Johannes Petrus Maria Smeulers, Michel Riepen, Sergei Shulepov +2 more |
2013-04-16 |