| 7518706 |
Exposure apparatus, a tilting device method for performing a tilted focus test, and a device manufactured accordingly |
Jan-Peter Hauschild, Arie Jeffrey Den Boef, Uwe Mickan, Roeland Nicolaas Maria Vanneer, Jacobus Burghoorn |
2009-04-14 |
| 7492443 |
Device manufacturing method, device manufactured thereby and a mask for use in the method |
Jan Evert Van Der Werf, Erik Roelof Loopstra, Hans Meiling, Johannes Hubertus Josephina Moors |
2009-02-17 |
| 7480028 |
Lithographic apparatus for imaging a front side or a back side of a substrate, method of substrate identification, device manufacturing method, substrate, and computer program |
Michael Van Der Veen, Anastasius Jacobus Anicetus Bruinsma, Henricus Wilhelmus Maria Van Buel, Jacob Klinkhamer, Christianus Gerardus Maria De Mol +1 more |
2009-01-20 |
| 7474379 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Bob Streefkerk |
2009-01-06 |
| 7468779 |
Lithographic apparatus and device manufacturing method |
Roelof Frederik De Graaf, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +3 more |
2008-12-23 |
| 7433016 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +1 more |
2008-10-07 |
| 7423733 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby with docking system for positioning a patterning device |
Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Gert-Jan Heerens, Robert Gabriël Maria Lansbergen, Erik Roelof Loopstra |
2008-09-09 |
| 7420194 |
Lithographic apparatus and substrate edge seal |
Joost Jeroen Ottens, Johannes Henricus Wilhelmus Jacobs, Nicolaas Rudolf Kemper |
2008-09-02 |
| 7411657 |
Lithographic apparatus and device manufacturing method |
Joost Jeroen Ottens, Noud Jan Gilissen, Koen Jacobus Johannes Maria Zaal |
2008-08-12 |
| 7265366 |
Lithographic apparatus and device manufacturing method |
Engelbertus Antonius Fransiscus Van Der Pasch, Marcel Hendrikus Maria Beems |
2007-09-04 |
| 7177009 |
Position determination method and lithographic apparatus |
Jacob F. F. Klinkhamer, Anastasius Jacobus Anicetus Bruinsma, Hubert Adriaan Van Mierlo |
2007-02-13 |
| 7170580 |
Lithographic apparatus, projection system, method of projecting and device manufacturing method |
Henrikus Herman Marie Cox, Leon Martin Levasier |
2007-01-30 |
| 7119886 |
Lithographic apparatus, device manufacturing method, and angular encoder |
Hendricus Johannes Maria Meijer, Engelbertus Antonius Fransiscus Van Der Pasch, Michael Jozef Mathijs Renkens, Theo Anjes Maria Ruijl |
2006-10-10 |
| 7116399 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Wilhelmus Josephus Box, Antonius Johannes Josephus Van Dijsseldonk, Dominicus Jacobus Petrus Adrianus Franken, Erik Roelof Loopstra, Josephus Jacobus Smits +1 more |
2006-10-03 |
| 7095479 |
Lithographic apparatus, device manufacturing method and device manufactured thereby |
Lucas Henricus Johannes Stevens, Hans Meiling, Johannes Hubertus Josephina Moors |
2006-08-22 |
| 7042550 |
Device manufacturing method and computer program |
Martin Lowisch, Marcel Mathijs Theodore Marie Dierichs, Koen Van Ingen Schenau, Hans Van Der Laan, Elaine McCoo +1 more |
2006-05-09 |
| 6977713 |
Lithographic apparatus and device manufacturing method |
Bernardus Antonius Johannes Luttikhuis, Pertrus Bartray, Wilhelmus Josephus Box, Marc Wilhelmus Maria Van Der Wijst |
2005-12-20 |
| 6956222 |
Lithographic apparatus and method of manufacturing a device |
Noud Jan Gilissen, Sjoerd Nicolaas Lambertus Donders |
2005-10-18 |
| 6940587 |
Lithographic apparatus and a measurement system |
Hans Van Der Laan, Johannes Jacobus Matheus Baselmans, Antonius Johannes Josephus Van Dijsseldonk, Johannes Hubertus Josephina Moors |
2005-09-06 |
| 6930760 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Jan Van Elp, Vadim Yevgenyevich Banine, Hugo Matthieu Visser, Levinus Pieter Bakker |
2005-08-16 |
| 6879374 |
Device manufacturing method, device manufactured thereby and a mask for use in the method |
Jan Evert Van Der Werf, Erik Roelof Loopstra, Hans Meiling, Johannes Hubertus Josephina Moors |
2005-04-12 |
| 6862075 |
Lithographic projection apparatus, device manufacturing method, and device manufacturing thereby |
Norbertus Benedictus Koster, Bastiaan Mertens, Vladimir Vitalevitch Ivanov, Konstantin Nikolaevitch Koshelev, Vadim Yevgenyevich Banine |
2005-03-01 |
| 6781673 |
Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby |
Johannes Hubertus Josephina Moors, Vadim Yevgenyevich Banine, Henri Gerard Cato Werij, Hugo Matthieu Visser, Gerrit-Jan Heerens +4 more |
2004-08-24 |
| 6741329 |
Lithographic apparatus and device manufacturing method |
Johannes Hubertus Josephina Moors, Erik Roelof Loopstra, Noud Jan Gilissen, Markus Franciscus Antonius Eurlings |
2004-05-25 |
| 6678037 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Jan Van Elp, Vadim Yevgenyevich Banine, Hugo Matthieu Visser, Levinus Pieter Bakker |
2004-01-13 |