Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10146142 | Lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Johannes Jacobus Matheus Baselmans, Marcel Mathijs Theodore Marie Dierichs, Johannes Christiaan Maria Jasper, Matthew Lipson +3 more | 2018-12-04 |
| 9606448 | Lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Johannes Jacobus Matheus Baselmans, Marcel Mathijs Theodore Marie Dierichs, Johannes Christiaan Maria Jasper, Matthew Lipson +3 more | 2017-03-28 |
| 9442388 | Lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Johannes Jacobus Matheus Baselmans, Marcel Mathijs Theodore Marie Dierichs, Johannes Christiaan Maria Jasper, Matthew Lipson +3 more | 2016-09-13 |
| 8634062 | Actuator system, lithographic apparatus, method of controlling the position of a component and device manufacturing method | Gosse Charles De Vries, Edwin Johan Buis | 2014-01-21 |
| 8208123 | Lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Johannes Jacobus Matheus Baselmans, Marcel Mathijs Theodore Marie Dierichs, Johannes Christiaan Maria Jasper, Hendricus Johannes Maria Meijer +3 more | 2012-06-26 |
| 7960074 | Method of generating a photolithography patterning device, computer program, patterning device, method of determining the position of a target image on or proximate a substrate, measurement device, and lithographic apparatus | Hendricus Johannes Maria Meijer | 2011-06-14 |
| 7834975 | Method and exposure apparatus for performing a tilted focus and a device manufactured accordingly | Jacobus Burghoorn, Jan-Peter Hauschild, Arie Jeffrey Den Boef, Martinus Hendrikus Antonius Leenders, Roeland Nicolaas Maria Vanneer | 2010-11-16 |
| 7817246 | Optical apparatus | Antonius Johannes Josephus Van Dijsseldonk | 2010-10-19 |
| 7713665 | Lithographic apparatus and patterning device | Antonius Johannes Dijsseldonk | 2010-05-11 |
| 7518706 | Exposure apparatus, a tilting device method for performing a tilted focus test, and a device manufactured accordingly | Jan-Peter Hauschild, Arie Jeffrey Den Boef, Martinus Hendrikus Antonius Leenders, Roeland Nicolaas Maria Vanneer, Jacobus Burghoorn | 2009-04-14 |
| 7514186 | System for electrically connecting a mask to earth, a mask | Hendricus Johannes Maria Meijer, Marco Kluse | 2009-04-07 |
| 7463336 | Device manufacturing method and apparatus with applied electric field | Antonius Johannes Josephus Van Dijsseldonk | 2008-12-09 |
| 7369216 | Lithographic system, method for adapting transmission characteristics of an optical pathway within a lithographic system, semiconductor device, method of manufacturing a reflective element for use in a lithographic system, and reflective element manufactured thereby | Johannes Hubertus Josephina Moors, Wolfgang Singer, Hans-Juergen Mann | 2008-05-06 |
| 7177010 | Lithographic apparatus and device manufacturing method | Hans Van Der Laan, Markus Franciscus Antonius Eurlings, Jan Bernard Plechelmus Van Schoot | 2007-02-13 |
| 7145640 | Lithographic apparatus, device manufacturing method and variable attenuator | Harm-Jan Voorma, Antonius Johannes Josephus Van Dijsseldonk | 2006-12-05 |
| 7136149 | Lithographic apparatus with autofocus system | Antonius Johannes Josephus Van Dijsseldonk | 2006-11-14 |
| 7098994 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Johannes Hubertus Josephina Moors, Harm-Jan Voorma, Johannes Christiaan Leonardus Franken | 2006-08-29 |
| 7092072 | Calibration apparatus and method of calibrating a radiation sensor in a lithographic apparatus | Johannes Hubertus Josephina Moors | 2006-08-15 |
| 7042550 | Device manufacturing method and computer program | Martin Lowisch, Marcel Mathijs Theodore Marie Dierichs, Koen Van Ingen Schenau, Hans Van Der Laan, Martinus Hendrikus Antonius Leenders +1 more | 2006-05-09 |
| 6980281 | Lithographic apparatus and device manufacturing method | Johannes Hubertus Josephina Moors | 2005-12-27 |