| 8405817 |
Lithographic apparatus, a method of controlling the apparatus and a device manufacturing method |
Marco Koert Stavenga, Nicolaas Rudolf Kemper, Paulus Martinus Maria Liebregts, Johannes Catharinus Hubertus Mulkens, Erik Henricus Egidius Catharina Eummelen +16 more |
2013-03-26 |
| 8248577 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hans Jansen +4 more |
2012-08-21 |
| 8237912 |
Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method |
Herman Boom, Borgert Kruizinga, Johannes Catharinus Hubertus Mulkens, Huibert Visser, Peter Julian Pollard |
2012-08-07 |
| 8232540 |
Lithographic apparatus and substrate edge seal |
Joost Jeroen Ottens, Johannes Henricus Wilhelmus Jacobs, Nicolaas Rudolf Kemper |
2012-07-31 |
| 8144305 |
Lithographic apparatus and device manufacturing method |
Nicolaas Ten Kate, Michel Riepen, Sergei Shulepov |
2012-03-27 |
| 8138486 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sebastiaan Maria Johannes Cornelissen, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +7 more |
2012-03-20 |
| 8120749 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Bob Streefkerk |
2012-02-21 |
| 8115903 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +1 more |
2012-02-14 |
| 8023101 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Nicolaas Ten Kate, Michel Riepen, Sergei Shulepov |
2011-09-20 |
| 8003968 |
Lithographic apparatus and substrate edge seal |
Joost Jeroen Ottens, Johannes Henricus Wilhelmus Jacobs, Nicolaas Rudolf Kemper |
2011-08-23 |
| 7978306 |
Lithographic apparatus and device manufacturing method |
Joost Jeroen Ottens, Noud Jan Gilissen |
2011-07-12 |
| 7969549 |
Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method |
Herman Boom, Borgert Kruizinga, Johannes Catharinus Hubertus Mulkens, Huibert Visser, Peter Julian Pollard |
2011-06-28 |
| 7928407 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sebastiaan Maria Johannes Cornelissen, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +7 more |
2011-04-19 |
| 7929112 |
Lithographic apparatus and device manufacturing method |
Roelof Frederik De Graaf, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +3 more |
2011-04-19 |
| 7916269 |
Lithographic apparatus and contamination removal or prevention method |
Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Antonius Johannus Van Der Net, Peter Franciscus Wanten, Jacques Cor Johan Van Der Donck +4 more |
2011-03-29 |
| 7903232 |
Lithographic apparatus and device manufacturing method |
Michel Riepen, Martin Anton Bos |
2011-03-08 |
| 7864292 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Joost Jeroen Ottens |
2011-01-04 |
| 7839483 |
Lithographic apparatus, device manufacturing method and a control system |
Sjoerd Nicolaas Lambertus Donders, Nicolaas Rudolf Kemper |
2010-11-23 |
| 7834975 |
Method and exposure apparatus for performing a tilted focus and a device manufactured accordingly |
Jacobus Burghoorn, Jan-Peter Hauschild, Arie Jeffrey Den Boef, Uwe Mickan, Roeland Nicolaas Maria Vanneer |
2010-11-16 |
| 7804577 |
Lithographic apparatus |
Nicolaas Ten Kate, Nicolaas Rudolf Kemper, Joost Jeroen Ottens, Marcel Beckers, Johannes Petrus Maria Smeulers +2 more |
2010-09-28 |
| 7751027 |
Lithographic apparatus and device manufacturing method |
Johannes Henricus Wilhelmus Jacobs, Igor Petrus Maria Bouchoms, Nicolaas Ten Kate, Nicolaas Rudolf Kemper, Erik Roelof Loopstra +6 more |
2010-07-06 |
| 7656501 |
Lithographic apparatus |
Nicolaas Ten Kate, Nicolaas Rudolf Kemper, Joost Jeroen Ottens, Johannes Petrus Maria Smeulers |
2010-02-02 |
| 7656502 |
Lithographic apparatus and device manufacturing method |
Harmen Klaus Van Der Schoot, Noud Jan Gilissen, Peter Paul Steijaert, Erik Roelof Loopstra, Nicolaas Rudolf Kemper +8 more |
2010-02-02 |
| 7633073 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sebastiaan Maria Johannes Cornelissen, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +7 more |
2009-12-15 |
| 7602470 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christian Alexander Hoogendam +12 more |
2009-10-13 |