Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8237912 | Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method | Herman Boom, Borgert Kruizinga, Martinus Hendrikus Antonius Leenders, Johannes Catharinus Hubertus Mulkens, Huibert Visser | 2012-08-07 |
| 7969549 | Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method | Herman Boom, Borgert Kruizinga, Martinus Hendrikus Antonius Leenders, Johannes Catharinus Hubertus Mulkens, Huibert Visser | 2011-06-28 |