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Fluid handling structure, lithographic apparatus and device manufacturing method |
Michel Riepen, Sandra Van Der Graaf, Rogier Hendrikus Magdalena Cortie, Takeshi Kaneko, Nina Vladimirovna Dziomkina +6 more |
2017-04-18 |
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Lithographic apparatus and a device manufacturing method involving an elongate liquid supply opening or an elongate region of relatively high pressure |
Daniel Jozef Maria Direcks, Clemens Johannes Gerardus Van Den Dungen, Maikel Adrianus Cornelis Schepers, Sergei Shulepov, Pieter Mulder +2 more |
2017-04-11 |
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Fluid handling structure, a lithographic apparatus and a device manufacturing method |
David Bessems, Michel Riepen, Rogier Hendrikus Magdalena Cortie, Adrianes Johannes Baeten, Cornelius Maria Rops |
2017-02-07 |
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Lithographic apparatus |
Clemens Johannes Gerardus Van Den Dungen, Nicolaas Franciscus Koppelaars, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Johannes Catharinus Hubertus Mulkens +7 more |
2016-10-11 |
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Fluid handling structure, a lithographic apparatus and a device manufacturing method |
David Bessems, Rogier Hendrikus Magdalena Cortie, Marcus Johannes Van Der Zanden, Cornelius Maria Rops, Paul A. Willems +1 more |
2016-03-22 |
| 9195147 |
Lithographic apparatus and device manufacturing method involving a seal between a table and a component |
Koen Steffens, Ronald Van Der Ham |
2015-11-24 |
| 9176393 |
Lithographic apparatus and a method of operating the apparatus |
Christian Gerardus Norbertus Hendricus Marie Cloin, Nicolaas Ten Kate, Nicolaas Rudolf Kemper, Marco Koert Stavenga, Michel Riepen +3 more |
2015-11-03 |
| 9036127 |
Lithographic apparatus |
Clemens Johannes Gerardus Van Den Dungen, Nicolaas Franciscus Koppelaars, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Johannes Catharinus Hubertus Mulkens +7 more |
2015-05-19 |
| 8836912 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
David Bessems, Rogier Hendrikus Magdalena Cortie, Marcus Johannes Van Der Zanden, Jimmy Matheus Wilhelmus Van De Winkel, Cornelius Maria Rops +1 more |
2014-09-16 |
| 8599356 |
Shutter member, a lithographic apparatus and device manufacturing method |
Takeshi Kaneko, Nina Vladimirovna Dziomkina, Matthias Kruizinga |
2013-12-03 |
| 8446561 |
Lithographic apparatus and a method of measuring flow rate in a two phase flow |
Pieter Jacob Kramer, Antonius Johannus Van Der Net, Anthonie Kuijper |
2013-05-21 |
| 8416388 |
Fluid handling device, an immersion lithographic apparatus and a device manufacturing method |
Koen Steffens, Takeshi Kaneko, Gregory Martin Mason Corcoran |
2013-04-09 |
| 8405817 |
Lithographic apparatus, a method of controlling the apparatus and a device manufacturing method |
Marco Koert Stavenga, Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Johannes Catharinus Hubertus Mulkens +16 more |
2013-03-26 |