| 8654309 |
Fluid extraction system, lithographic apparatus and device manufacturing method |
Robertus Nicodemus Jacobus Van Ballegoij, Marcus Martinus Petrus Adrianus Vermeulen, Michel Riepen, Martinus Wilhelmus Van Den Heuvel, Paul Petrus Joannes Berkvens +3 more |
2014-02-18 |
| 8614784 |
Fluid handling structure, lithographic apparatus and device manufacturing method, involving gas supply |
Michel Riepen, Johannes Catharinus Hubertus Mulkens, Rogier Hendrikus Magdalena Cortie, Ralph Joseph Meijers, Fabrizio Evangelista |
2013-12-24 |
| 8564760 |
Lithographic apparatus, device manufacturing method and a control system |
Martinus Hendrikus Antonius Leenders, Sjoerd Nicolaas Lambertus Donders |
2013-10-22 |
| 8547523 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Michel Riepen |
2013-10-01 |
| 8446563 |
Lithographic apparatus and device manufacturing method |
Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +12 more |
2013-05-21 |
| 8427629 |
Lithographic apparatus and device manufacturing method |
Carlo Cornelis Maria Luijten, Sjoerd Nicolaas Lambertus Donders, Martinus Hendrikus Antonius Leenders, Erik Roelof Loopstra, Bob Streefkerk +3 more |
2013-04-23 |
| 8405817 |
Lithographic apparatus, a method of controlling the apparatus and a device manufacturing method |
Marco Koert Stavenga, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Johannes Catharinus Hubertus Mulkens, Erik Henricus Egidius Catharina Eummelen +16 more |
2013-03-26 |
| 8368868 |
Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless |
Johannes Petrus Martinus Bernardus Vermeulen, Marcel Koenraad Marie Baggen, Hans Butler, Henrikus Herman Marie Cox, Jan Van Eijk +7 more |
2013-02-05 |
| 8345218 |
Immersion lithographic apparatus, drying device, immersion metrology apparatus and device manufacturing method |
Michel Riepen, Johannes Petrus Martinus Bernardus Vermeulen, Daniel Jozef Maria Direcks, Danny Maria Hubertus Philips, Arnold Jan Van Putten |
2013-01-01 |
| 8259283 |
Immersion lithographic apparatus and device manufacturing method |
Daniel Jozef Maria Direcks, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons, Danny Maria Hubertus Philips +5 more |
2012-09-04 |
| 8259287 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate +2 more |
2012-09-04 |
| 8232540 |
Lithographic apparatus and substrate edge seal |
Joost Jeroen Ottens, Johannes Henricus Wilhelmus Jacobs, Martinus Hendrikus Antonius Leenders |
2012-07-31 |
| 8031325 |
Lithographic apparatus and device manufacturing method |
Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +8 more |
2011-10-04 |
| 8027019 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Joost Jeroen Ottens, Edwin Cornelis Kadijk, Sergei Shulepov |
2011-09-27 |
| 8003968 |
Lithographic apparatus and substrate edge seal |
Joost Jeroen Ottens, Johannes Henricus Wilhelmus Jacobs, Martinus Hendrikus Antonius Leenders |
2011-08-23 |
| 7864292 |
Lithographic apparatus and device manufacturing method |
Martinus Hendrikus Antonius Leenders, Joost Jeroen Ottens |
2011-01-04 |
| 7852457 |
Lithographic apparatus and device manufacturing method |
Stefan Philip Christiaan Belfroid, Nicolaas Ten Kate, Johannes Petrus Maria Smeulers, Arno Willem Frederik Volker, Rene Breeuwer |
2010-12-14 |
| 7839483 |
Lithographic apparatus, device manufacturing method and a control system |
Martinus Hendrikus Antonius Leenders, Sjoerd Nicolaas Lambertus Donders |
2010-11-23 |
| 7834974 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Nicolaas Ten Kate, Sergei Shulepov |
2010-11-16 |
| 7808614 |
Lithographic apparatus and device manufacturing method |
Carlo Cornelis Maria Luijten, Sjoerd Nicolaas Lambertus Donders, Martinus Hendrickus Antonius Leenders, Erik Roelof Loopstra, Bob Streefkerk +3 more |
2010-10-05 |
| 7804577 |
Lithographic apparatus |
Martinus Hendrikus Antonius Leenders, Nicolaas Ten Kate, Joost Jeroen Ottens, Marcel Beckers, Johannes Petrus Maria Smeulers +2 more |
2010-09-28 |
| 7760324 |
Lithographic apparatus and device manufacturing method |
Jozef Petrus Henricus Benschop, Hans Butler, Bartholomeus Hendricus Koek, Frits Van Der Meulen, Harmen Klaas Van Der Schoot |
2010-07-20 |
| 7751027 |
Lithographic apparatus and device manufacturing method |
Johannes Henricus Wilhelmus Jacobs, Igor Petrus Maria Bouchoms, Nicolaas Ten Kate, Martinus Hendrikus Antonius Leenders, Erik Roelof Loopstra +6 more |
2010-07-06 |
| 7705962 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Nicolaas Ten Kate, Frits Van Der Meulen |
2010-04-27 |
| 7701550 |
Lithographic apparatus and device manufacturing method |
Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +8 more |
2010-04-20 |
