| 7679720 |
Apparatus configured to position a workpiece |
Michel Pieter Dansberg, Sebastiaan Maria Johannes Cornelissen, Henrikus Herman Marie Cox, Robert Johannes Petrus Van Diesen, Robert-Han Munnig-Schmidt +2 more |
2010-03-16 |
| 7656501 |
Lithographic apparatus |
Nicolaas Ten Kate, Martinus Hendrikus Antonius Leenders, Joost Jeroen Ottens, Johannes Petrus Maria Smeulers |
2010-02-02 |
| 7656502 |
Lithographic apparatus and device manufacturing method |
Harmen Klaus Van Der Schoot, Noud Jan Gilissen, Peter Paul Steijaert, Erik Roelof Loopstra, Nicolaas Ten Kate +8 more |
2010-02-02 |
| 7602470 |
Lithographic apparatus and device manufacturing method |
Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christian Alexander Hoogendam, Nicolaas Ten Kate +12 more |
2009-10-13 |
| 7522261 |
Lithographic apparatus and device manufacturing method |
Carlo Cornelis Maria Luijten, Sjoerd Nicolaas Lambertus Donders, Martinus Hendrickus Antonius Leenders, Erik Roelof Loopstra, Bob Streefkerk +3 more |
2009-04-21 |
| 7420194 |
Lithographic apparatus and substrate edge seal |
Joost Jeroen Ottens, Johannes Henricus Wilhelmus Jacobs, Martinus Hendrikus Antonius Leenders |
2008-09-02 |
| 7414699 |
Lithographic apparatus and device manufacturing method |
Stefan Philip Christiaan Belfroid, Nicolaas Ten Kate, Johannes Petrus Maria Smeulers, Arno Willem Frederik Volker, Rene Breeuwer |
2008-08-19 |
| 7411654 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate +2 more |
2008-08-12 |
| 7359032 |
Lithographic apparatus and device manufacturing method |
Michel Pieter Dansberg, Sebastiaan Maria Johannes Cornelissen, Henrikus Herman Marie Cox, Robert Johannes Petrus Van Diesen, Robert-Han Munnig Schmidt +2 more |
2008-04-15 |
| 7136142 |
Lithographic apparatus having a gas flushing device |
Marcel Beckers, Ronald Johannes Hultermans, Nicolaas Ten Kate, Nicolaas Franciscus Koppelaars, Jan-Marius Schotsman +2 more |
2006-11-14 |
| 7126671 |
Lithographic apparatus and device manufacturing method |
Henrikus Herman Marie Cox, Dominicus Jacobus Petrus Adrianus Franken, Engelbertus Antonius Fransiscus Van Der Pasch, Martijn Johannes Verbunt, Lambertus Adrianus Van Den Wildenberg |
2006-10-24 |
| 6995379 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Petrus Matthijs Henricus Vosters, Hernes Jacobs, Mark Van Heumen |
2006-02-07 |
| 6937316 |
Lithographic apparatus, device manufacturing method and device manufactured thereby |
Hernes Jacobs, Edwin Johan Buis |
2005-08-30 |
| 6933513 |
Gas flushing system for use in lithographic apparatus |
Tjarko Adriaan Rudolf Van Empel, Raymond Laurentius Johannes Schrijver, Johannes Andreas Henricus Maria Jacobs, Nicolaas Franciscus Koppelaars |
2005-08-23 |
| 4929146 |
Manipulator |
Marinus P. Koster, Willem van der Hoek, Hermanus M. J. R. Soemers |
1990-05-29 |
| 4872362 |
Driving mechanism and manipulator comprising such a driving mechanism |
Henricus Johannes Joseph Bouwens, Marinus P. Koster, Willem L. G. De Peuter |
1989-10-10 |
