Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7439001 | Focus blur measurement and control method | Christopher P. Ausschnitt, Timothy A. Brunner, Shahid Butt | 2008-10-21 |
| 7351348 | Evaporation control using coating | Dario L. Goldfarb, Steven J. Holmes, Kurt R. Kimmel, Michael Lercel | 2008-04-01 |
| 7230681 | Method and apparatus for immersion lithography | Steven J. Holmes, Toshiharu Furukawa, Mark C. Hakey, David V. Horak, Charles W. Koburger, III | 2007-06-12 |
| 6919146 | Planar reticle design/fabrication method for rapid inspection and cleaning | Christopher J. Progler, Nakgeuon Seong | 2005-07-19 |
| 5427878 | Semiconductor wafer processing with across-wafer critical dimension monitoring using optical endpoint detection | — | 1995-06-27 |
| 5280437 | Structure and method for direct calibration of registration measurement systems to actual semiconductor wafer process topography | — | 1994-01-18 |