Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8691695 | CMP compositions and methods for suppressing polysilicon removal rates | Kevin Moeggenborg, William Ward, Ming-Shih Tsai | 2014-04-08 |
| 8597540 | Compositions for polishing silicon-containing substrates | Zhan Chen | 2013-12-03 |
| 8529680 | Compositions for CMP of semiconductor materials | Steven Grumbine, Phillip W. Carter, Shoutian Li, Jian Zhang, David Schroeder +1 more | 2013-09-10 |
| 8247327 | Methods and compositions for polishing silicon-containing substrates | Zhan Chen | 2012-08-21 |
| 8101093 | Chemical-mechanical polishing composition and method for using the same | Kevin Moeggenborg, Vlasta Brusic, Benjamin Bayer | 2012-01-24 |
| 7803203 | Compositions and methods for CMP of semiconductor materials | Steven Grumbine, Phillip W. Carter, Shoutian Li, Jian Zhang, David Schroeder +1 more | 2010-09-28 |
| 7776230 | CMP system utilizing halogen adduct | Steven Grumbine | 2010-08-17 |
| 7563383 | CMP composition with a polymer additive for polishing noble metals | Benjamin Bayer | 2009-07-21 |
| 7456107 | Compositions and methods for CMP of low-k-dielectric materials | Jason Keleher, Daniel Woodland, Robert E. Medsker, Jason Aggio | 2008-11-25 |
| 7316603 | Compositions and methods for tantalum CMP | Phillip W. Carter, Jian Zhang, Steven Grumbine | 2008-01-08 |
| 7288021 | Chemical-mechanical polishing of metals in an oxidized form | Vlasta Brusic, Benjamin Bayer | 2007-10-30 |
| 7160807 | CMP of noble metals | Vlasta Brusic, Benjamin Bayer | 2007-01-09 |
| 7161247 | Polishing composition for noble metals | Vlasta Brusic, Christopher Thompson, Benjamin Bayer | 2007-01-09 |
| 6677266 | Process for preparing a vanadium/titanium catalyst and use in olefin polymerization | — | 2004-01-13 |