Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11718767 | Chemical mechanical planarization composition for polishing oxide materials and method of use thereof | Chia-Chien Lee, Rung-Je Yang, Anu Mallikarjunan, Chris Keh-Yeuan Li, Hongjun Zhou +2 more | 2023-08-08 |
| 11401441 | Chemical mechanical planarization (CMP) composition and methods therefore for copper and through silica via (TSV) applications | Xiaobo Shi, Laura M. Matz, Chris Keh-Yeuan Li, Pao-Chia Pan, Chad Chang-Tse Hsieh +4 more | 2022-08-02 |
| 8691695 | CMP compositions and methods for suppressing polysilicon removal rates | Kevin Moeggenborg, William Ward, Francesco De Rege Thesauro | 2014-04-08 |
| 8529680 | Compositions for CMP of semiconductor materials | Francesco De Rege Thesauro, Steven Grumbine, Phillip W. Carter, Shoutian Li, Jian Zhang +1 more | 2013-09-10 |
| 7803203 | Compositions and methods for CMP of semiconductor materials | Francesco De Rege Thesauro, Steven Grumbine, Phillip W. Carter, Shoutian Li, Jian Zhang +1 more | 2010-09-28 |
| 6555424 | Thin film transistor with sub-gates and schottky source/drain and a manufacturing method of the same | Horng-Chih Lin, Tiao-Yuan Huang | 2003-04-29 |
| 6174454 | Slurry formulation for selective CMP of organic spin-on-glass insulating layer with low dielectric constant | Shih-Tzung Chang, Bau-Tong Dai, Ying-Lang Wang | 2001-01-16 |
| 5922091 | Chemical mechanical polishing slurry for metallic thin film | Wei-Tsu Tseng | 1999-07-13 |