AM

Anu Mallikarjunan

VU Versum Materials Us: 1 patents #84 of 174Top 50%
Overall (All Time): #2,598,097 of 4,157,543Top 65%
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Issued Patents All Time

Patent #TitleCo-InventorsDate
11718767 Chemical mechanical planarization composition for polishing oxide materials and method of use thereof Ming-Shih Tsai, Chia-Chien Lee, Rung-Je Yang, Chris Keh-Yeuan Li, Hongjun Zhou +2 more 2023-08-08