Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8435421 | Metal-passivating CMP compositions and methods | Pankaj Kumar Singh, Vlasta Brusic | 2013-05-07 |
| 7955520 | Copper-passivating CMP compositions and methods | Daniela White, John Parker | 2011-06-07 |
| 7456107 | Compositions and methods for CMP of low-k-dielectric materials | Daniel Woodland, Francesco De Rege Thesauro, Robert E. Medsker, Jason Aggio | 2008-11-25 |
| 6916428 | Photo-chemical remediation of Cu-CMP waste | Yuzhuo Li, Ning GAO | 2005-07-12 |
| 6660639 | Method of fabricating a copper damascene structure | Yuzhuo Li | 2003-12-09 |
| 6656241 | Silica-based slurry | Stuart D. Hellring, Colin P. McCann, Charles F. Kahle, II, Yuzhuo Li | 2003-12-02 |
| 6508953 | Slurry for chemical-mechanical polishing copper damascene structures | Yuzhuo Li | 2003-01-21 |
| 6258721 | Diamond slurry for chemical-mechanical planarization of semiconductor wafers | Yuzhuo Li, David Cerutti, Donald Joseph Buckley, Earl Royce Tyre, Jr., Richard J. Uriarte +1 more | 2001-07-10 |
| 6242351 | Diamond slurry for chemical-mechanical planarization of semiconductor wafers | Yuzhuo Li, David Cerutti, Donald Joseph Buckley, Earl Royce Tyre, Jr., Richard J. Uriarte +1 more | 2001-06-05 |