| 12398293 |
Composition and method for polishing boron doped polysilicon |
Brittany Johnson, Alexander W. Hains, Roman A. Ivanov |
2025-08-26 |
|
| 12157834 |
Composition and method for polysilicon CMP |
Sarah Brosnan |
2024-12-03 |
|
| 11802220 |
Silica-based slurry for selective polishing of carbon-based films |
Fernando HUNG LOW, Michael M. Morrow, Helin Huang |
2023-10-31 |
|
| 10414947 |
Polishing composition containing ceria particles and method of use |
Viet Lam, Renhe Jia |
2019-09-17 |
$5,680,000 |
| 9828528 |
Polishing composition containing ceria abrasive |
Dana Sauter Van Ness, Viet Lam, Alexander W. Hains, Steven Kraft, Renhe Jia |
2017-11-28 |
$7,737,000 |
| 9758697 |
Polishing composition containing cationic polymer additive |
Dana Sauter Van Ness, Viet Lam, Renhe Jia |
2017-09-12 |
$13,700,000 |
| 9701871 |
Composition and method for polishing bulk silicon |
John Clark, Lamon Jones, Jeffrey Gilliland, Michael White |
2017-07-11 |
$15,211,000 |
| 9597768 |
Selective nitride slurries with improved stability and improved polishing characteristics |
Prativa PANDEY, Juyeon Chang |
2017-03-21 |
$16,654,000 |
| 9505952 |
Polishing composition containing ceria abrasive |
Dana Sauter Van Ness, Viet Lam, Alexander W. Hains, Steven Kraft, Renhe Jia |
2016-11-29 |
$15,937,000 |
| 9481215 |
Air pressure control system |
— |
2016-11-01 |
|
| 9425037 |
Silicon polishing compositions with improved PSD performance |
John Clark, Lamon Jones, Michael White |
2016-08-23 |
$5,125,000 |
| 9340706 |
Mixed abrasive polishing compositions |
Jakub W. Nalaskowski, Viet Lam, Renhe Jia, Jeffrey Dysard |
2016-05-17 |
$8,405,000 |
| 9302554 |
Air pressure control system |
— |
2016-04-05 |
|
| 9279067 |
Wet-process ceria compositions for polishing substrates, and methods related thereto |
— |
2016-03-08 |
$6,030,000 |
| 9281210 |
Wet-process ceria compositions for polishing substrates, and methods related thereto |
Jeffrey Dysard, Sairam Shekhar |
2016-03-08 |
$6,030,000 |
| 9238753 |
CMP compositions selective for oxide and nitride with high removal rate and low defectivity |
Glenn Whitener |
2016-01-19 |
$3,753,000 |
| 8969252 |
Peptide mediated synthesis of metallic and magnetic materials |
Angela M. Belcher, Chuanbin Mao, Daniel J. Solis |
2015-03-03 |
|
| 8916061 |
CMP compositions selective for oxide and nitride with high removal rate and low defectivity |
Michael Willhoff, Daniel Mateja |
2014-12-23 |
$13,238,000 |
| 8883034 |
Composition and method for polishing bulk silicon |
John Clark, Lamon Jones, Jeffrey Gilliland, Michael White |
2014-11-11 |
|
| 8815110 |
Composition and method for polishing bulk silicon |
Michael White, Lamon Jones, John Clark |
2014-08-26 |
$12,927,000 |
| 8697576 |
Composition and method for polishing polysilicon |
Timothy Johns, Michael White, Lamon Jones, John Clark |
2014-04-15 |
$8,296,000 |
| 8273142 |
Silicon polishing compositions with high rate and low defectivity |
Michael White, Richard A. Romine, Jeffrey Gilliland, Lamon Jones |
2012-09-25 |
$14,028,000 |
| 7922926 |
Composition and method for polishing nickel-phosphorous-coated aluminum hard disks |
Selvaraj Palanisamy Chinnathambi, Ping Ha YEUNG |
2011-04-12 |
$5,832,000 |
| 7374893 |
Peptide mediated synthesis of metallic and magnetic materials |
Angela M. Belcher, Chuanbin Mao, Daniel J. Solis |
2008-05-20 |
|
| 7045049 |
Method of manufacture of colloidal rod particles as nanobar codes |
Michael J. Natan, Thomas E. Mallouk, Benjamin R. Martin, Louis J. Dietz, James L. Winkler |
2006-05-16 |
|
