Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9850402 | CMP compositions and methods for selective removal of silicon nitride | Dmitry Dinega, Sairam Shekhar, Renhe Jia | 2017-12-26 |
| 9303187 | Compositions and methods for CMP of silicon oxide, silicon nitride, and polysilicon materials | Dimitry Dinega, Kevin Moeggenborg, William Ward | 2016-04-05 |
| 8916061 | CMP compositions selective for oxide and nitride with high removal rate and low defectivity | Brian Reiss, Michael Willhoff | 2014-12-23 |