| 11802220 |
Silica-based slurry for selective polishing of carbon-based films |
Brian Reiss, Fernando HUNG LOW, Michael M. Morrow |
2023-10-31 |
| 11597854 |
Method to increase barrier film removal rate in bulk tungsten slurry |
William J. Ward, III, Matthew E. Carnes, Ji Cui |
2023-03-07 |
| 11043151 |
Surface treated abrasive particles for tungsten buff applications |
Ji Cui, Kevin P. Dockery, Pankaj Kumar Singh, Hung-Tsung HUANG, Chih-Hsien Chien |
2021-06-22 |
| 10522341 |
Composition and method for removing residue from chemical-mechanical planarization substrate |
Ji Cui |
2019-12-31 |
| 10066126 |
Tungsten processing slurry with catalyst |
Kevin P. Dockery, Matthew E. Carnes, Glenn Whitener |
2018-09-04 |
| 9771496 |
Tungsten-processing slurry with cationic surfactant and cyclodextrin |
Kevin P. Dockery, Lin Fu, Tina Li |
2017-09-26 |
| 9631122 |
Tungsten-processing slurry with cationic surfactant |
Kevin P. Dockery, Lin Fu |
2017-04-25 |