Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12235573 | EUV photomask and manufacturing method of the same | Tran-Hui Shen, Ching-Hsiang Hsu | 2025-02-25 |
| 12066760 | Reticle-masking structure, extreme ultra violet apparatus, and method of forming the same | Ching-Hsiang Hsu, James Jeng-Jyi Hwang | 2024-08-20 |
| 11782338 | EUV photomask and manufacturing method of the same | Tran-Hui Shen, Ching-Hsiang Hsu | 2023-10-10 |
| 11307489 | EUV photomask and manufacturing method of the same | Tran-Hui Shen, Ching-Hsiang Hsu | 2022-04-19 |
| 11287745 | Reticle-masking structure, extreme ultraviolet apparatus, and method of forming the same | Ching-Hsiang Hsu, James Jeng-Jyi Hwang | 2022-03-29 |
| 11260495 | Apparatus and methods for chemical mechanical polishing | Ji Cui | 2022-03-01 |
| 11255658 | Ellipsometer and method for estimating thickness of film | Chi-Ming Yang, Ching-Hsiang Hsu, Chyi Shyuan Chern | 2022-02-22 |
| 11199767 | Apparatus and method for generating an electromagnetic radiation | Chung-Chieh Lee, Chyi Shyuan Chern, Chi-Ming Yang, Tsiao-Chen Wu, Chun-Lin Chang | 2021-12-14 |
| 10880982 | Light generation system using metal-nonmetal compound as precursor and related light generation method | Ching-Hsiang Hsu, Hsu-Kai Chang, Chi-Ming Yang | 2020-12-29 |
| 10866519 | Reticle-masking structure, extreme ultraviolet apparatus, and method of forming the same | Ching-Hsiang Hsu, James Jeng-Jyi Hwang | 2020-12-15 |
| 10760896 | Ellipsometer and method for estimating thickness of film | Chi-Ming Yang, Ching-Hsiang Hsu, Chyi Shyuan Chern | 2020-09-01 |
| 10509311 | Apparatus and method for generating an electromagnetic radiation | Chung-Chieh Lee, Chyi Shyuan Chern, Chi-Ming Yang, Tsiao-Chen Wu, Chun-Lin Chang | 2019-12-17 |