Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11705324 | Apparatus and method for wafer cleaning | Hsin-Hsien Lu, Ting-Kui Chang | 2023-07-18 |
| 10998184 | Apparatus and method for wafer cleaning | Hsin-Hsien Lu, Ting-Kui Chang | 2021-05-04 |
| 10325772 | Apparatus and method for wafer cleaning | Hsin-Hsien Lu, Ting-Kui Chang | 2019-06-18 |
| 9576789 | Apparatus, method, and composition for far edge wafer cleaning | Hsin-Hsien Lu, Ting-Kui Chang | 2017-02-21 |
| 9305851 | Systems and methods for chemical mechanical planarization with fluorescence detection | I-Shuo Liu, Hui-Chi Huang, Chien-Ping Lee | 2016-04-05 |